Dr. Thomas Morgenstern

Senior Vice President

Robert Bosch GmbH

BOSCH’s path to entire Fab Automation

Fab Automation is a mandatory measure for speed, quality and cost in 200mm volume manufacturing, and therefore a key to be competitive in semiconductor business. But can mature 200mm fabs be automated during full operation? For sure they can!

The basis of automation in 200mm fabs is already available in terms of equipment, process and workflows. The missing link to entire fab automation is an automated material handling. And yes: this can be implemented even during operation.

BOSCH’s path to entire Fab Automation shows how to do this. Based on a technical and commercial analysis, a systematic step-by-step approach for expansion was chosen, starting with the implementation of first applications in single areas like FSI Mercury, wet benches and lithography. In a second step a global transportation system was installed and finally this was leading to an expansion into more and more areas.

Bosch’s vision is to complete the automated material handling in all process areas and to reach an automation rate above 80%.

  • 1998 – 2009   Qimonda - Senior Director Manufacturing and Engineering
  • 2009 – 2010   Biotronik - Director manufacturing
  • 2010 – 2013   Globalfoundries - Director Engineering
  • Since 2013   Robert Bosch GmbH - SVP Manufacturing and Technology